MEMS Past and Present

Bosch has been at the forefront of MEMS development and manufacturing for over three decades. This presentation will provide a comprehensive overview of the evolution of MEMS technology from its early days to the present, with particular focus on Bosch's contributions to the field.

We will discuss the development of key MEMS processes and technologies, the transition from research to high-volume manufacturing, and the lessons learned along the way. The presentation will also cover the current state of MEMS technology and manufacturing, emerging applications, and the role of MEMS foundries in enabling innovation. Special attention will be paid to how MEMS technology has evolved to meet the demanding requirements of automotive, consumer electronics, and industrial applications.